Papers by Keyword: Rotation Direction

Abstract: Rotation direction of single-axis rotation SINS is researched in this paper. The two aspects: one-way, positive and negative rotation and clockwise, counterclockwise rotation are deeply analyzed respectively, and experimental verification is also taken. The results show that: FOG-based single-axis SINS should rotate with the positive and negative rotation way. It has a significant meaning to the engineering application of this technology.

Abstract: The calculating model of surface non-uniformity of polishing pad and the kinematical model between polishing pad and conditioner are initially established. Then the effects of several conditioning parameters were investigated by using the two models. The results of simulation and calculation show that the width ratio of diamond band of conditoner and the rotation speed at the same speed ratio between pad and conditioner have little effect on the surface non-uniformity of polishing pad, while at high non-integer rotation speed ratio, the surface non-uniformity of polishing pad is better than that at low integer speed ratio. The research results are available to select appropriate conditioning parameters especially for the stringent requirement of within-wafer non-uniformity in next generation IC.