Papers by Keyword: Silicon Thin Films

Abstract: A Modified Monte-Carlo Method (MMCM) in which phonon bundles take non-energy is developed to model the steady state phonon radiative transfer in nanoscale materials. Heat transfer in silicon thin films is analyzed to examine the validity of the developed method. The temperature distributions and cross-plane thermal conductivity are determined by using the developed method for the silicon thin films and compared with the results in reference. The results indicate that the developed method has a good accuracy in solving the phonon radiative transfer in nanoscale materials. In addition, numerical accuracy can be improved by the increase of the number of samples in the simulations.

Abstract: Silicon thin film was successfully deposited on glass substrate using Radio frequency (RF) magnetron sputtering. The effect of deposition pressure on the physical and structural properties of thin films on the glass substrate was studied. The film thickness and deposition rate decreased with decreasing deposition pressure. Field emission scanning electron microscopy (FESEM) shows as the deposition pressure increased, the surface morphology transform from concise structured to not closely pack on the surface. Raman spectroscopy result showed that the peak was around 508 cm-1, showing that the thin film is nanocrystalline instead of polycrystalline silicon.