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Papers by Keyword: Superdiffusion Electron Beam Doping (EBD)

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Algorithm Animation for Superdiffusion of a Non-Equilibrium in Semiconductors

Authors: Takao Wada, Hiromichi Nagao

133

Electron Energy Dependennce of Impurity Concentrations in Semiconductors by Electron Beam Doping (Superdiffusion)

Authors: Takao Wada, Kazuhiro Yasuda, Hiroshi Fujimoto, Haruho Masuda

1619