Papers by Keyword: Trapped Charges

Abstract: This paper reports the investigation of a root cause of stain formation on the surfaces of diamond-like carbon (DLC) films. The DLC thin films are prepared using a radio-frequency plasma enhance chemical vapor deposition (RF-PECVD) technique with C₂H₄ as a carbon precursor gas. We have observed water spot-like stains on the DLC surfaces after treating the films with a dilute solution of dipropylene glycol monomethyl ether (DPGME). Low voltage-scanning electron microscopy (SEM) is employed to examine the thin layer of agglomerated stains on the surfaces. The results from capacitance-voltage (C-V) measurements show that as-deposited films inherit some trapped charge accumulations within the structure, thereby resulting in the pronounced shift in the flat-band voltage. These trapped charges make the films prone to surface stain formation. Post-annealing of the DLC films at 200 °C in N₂ for 1 h has proven to reduce the trapped charge density, and therefore prevent stain formation on the DLC films.