Paper Titles
New Fluorescent Heterocyclic Materials: Synthesis, Solvatochromic and Fluorescence Properties
p.147
EPR and Optical Absorption Investigations of Photochromic Effect in Nearly Stoichiometric LiNbO3:Fe
p.152
Thermoelectric Properties of Bi2Te3/Sb2Te3 Thin Films
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High Field Polarization Response in Ferroelectrics: Current Solutions and Challenges
p.161
Low Pressure RF Plasma Jet Sputtering Technique Applied to Ferroelectric Films: Ba1-x SrxTiO3
p.165
Texture – Property Relationships in Bi-Layered Ferroelectric Ceramics: A Case Study of SrBi2Ta2O9
p.170
Relaxor-Like Behavior of Self-Polarized Pb(Zr,Ti)O3 Thin Films
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Synthesis and Dispersion of PZT Ultra-Fine Powders
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Growth of Lead Zirconate Titanate Single Crystals by the High Temperature Solution Method
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Low Pressure RF Plasma Jet Sputtering Technique Applied to Ferroelectric Films: Ba1-x SrxTiO3

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Abstract:

Technology aspects and characterization of BaxSr1-xTiO3 (BST) films fabricated with low pressure plasma jet technique are presented. BST films were deposited on silicon coated with Pt/TiO2/SiO2 and on bare Si substrates. The nozzles-type RF hollow cathode has been fabricated from hot pressed BaTiO3, SrTiO3, and BST ceramics. Controlling of RF voltage, RF current and substrate temperature allowed us to deposit reproducible films with controlled grain size. Hysteresis loops, ellipsometric and micro-Raman investigation results are presented and discussed.

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Periodical:

Materials Science Forum (Volumes 514-516)

Pages:

165-169

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.514-516.165

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Online since:

May 2006

Authors:

Alexander Deyneka, Zdenek Hubička, V.A. Trepakov, Gunnar Suchaneck, Lubomir Jastrabik, Gerald Gerlach, Jan Pokorny, Dasgmar Chvostova, J. Olejníček

Keywords:

BST, Ferroelectric Thin Film, Plasma Jet

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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