Structure and Surface Properties of Anatase TiO2 Thin Film by Sol-Gel Technique

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Abstract:

TiO2 coating films of 50-200nm thickness were prepared by the sol-gel technique using hydrolysis of titanium isopropoxide (TIP) in an attempt to study structure and surface properties of anatase at ambient temperature. The anatase phase is exhibited by the XRD peak at 2θ'=25o with orientation in (101), the crystal parameters of XRD for TiO2 thin films (50-200 nm), were varied depending on the thickness of film and substrate type. An annealing temperature and annealing time had an effect on the film surface quality and exhibit porosity and aggregates in the films. The surface of TiO2 thin film showed cluster particles through SEM and the shrinkage rate on the film increased as a result of heat treatment during annealing process. The film was uniform and homogeneous under AFM investigate. EDS have determined the stochiometric ratio of TiO2 film.

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165-172

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June 2006

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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[1] Jones, R. W. (1989). Fundamental principles of Sol-Gel technology. The Institute of metals, London SW1 5DB.

Google Scholar

[2] Leon., Maissel and Glang Reinhard (1970), Hand book of Thin Film Technology . McGrawHill Co. New York.

Google Scholar

[3] Brinker C. Jeffrey, Scherer George W., (1990), Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing, Academic Press, Inc. New York.

Google Scholar

[4] Murata, Takahashi and Hoffman, Appl. Phys. Lett., 68 (3) (1996), p.427.

Google Scholar

[5] Hiramoto, Fujiwara and Yokoyama., J. Appl. Phys., 72 (8) (1992), p.3781.

Google Scholar

[6] Cacciafesta Paola, Hallam Keith R., Oyedepo Caroline A., Lumphris Andrew D.L., Miles Mervyn J. and Jandt Klaus D. Chem. Mater. 14 (2002), 777-789. Characterizatio of Ulrtaflat Titanium Oxide Surfaces.

DOI: 10.1021/cm0112183

Google Scholar

[7] Lee W.G., Thin solid films 237 (1994) p.105.

Google Scholar

[8] Terabe K., J. Mater. Sci., 29 (1994), p.1617.

Google Scholar

[9] Viseu T.M.R., Almeida B., Stchakovsky M., Drevillon B., Ferreira M.I.C., Sousa B.J., Thin Solid Films 401 (2000), p.216.

DOI: 10.1016/s0040-6090(01)01479-1

Google Scholar

[10] DeLoach J.D., Scarel G., Aita C.R., J. Appl. Phys. 85 (1999), p.2377.

Google Scholar

[11] Kiisk V., Sildos I., Suisalu A., Aarik J., Thin Solid Films 400 (2001), p.130.

DOI: 10.1016/s0040-6090(01)01494-8

Google Scholar

[12] Terashima M., Inoue N., Kashiwabara s., Fujimoton R., Appl. Surf. Sci. 169/170 (2001) , p.535.

Google Scholar

[13] Battiston G.A., Gerbasi R., Gregori A., Porchia M., Cattarin S., Rizzi G.A., Thin Solid Films 371 (2000). p.126.

DOI: 10.1016/s0040-6090(00)00998-6

Google Scholar

[14] Saraf L. V., Patil S.I., Ogale S.B., Sainkar S.R., Kshirsager S.T., Int. J. Mod. Phys. B 12 (1998) , p.2635.

Google Scholar

[15] Vasilescu, E., Drop P., Popa M.V., Anghel M., Lopez A.S., Mirza-Rosca, I., Mater. Corros. 51 (2000),. p.413.

Google Scholar

[16] Miki, T., Yanagi H., Langmuir 14 (1998), p.3405.

Google Scholar

[17] Jeon N.L., Clem P.G., Nuzzo R. G, Payne D.A., J Mater. Res. 10 (1995) , p.2996.

Google Scholar

[18] Jobin M., Taborelli M., Descouts P., J Appl. Phys 77 (1995), p.5149.

Google Scholar

[19] Berkeley, Encyclopedia of crystal structures, Mat Sci 102 (1999) U. S.

Google Scholar

[20] Viswanath, Journal of physics and chemistry of Solids 62 (2001) 1991-(1998).

Google Scholar

[21] Jiang Hnngbo and Gao Lian., Materials Chemistry and Physics 9489 (2002), p.1.

Google Scholar

[22] Mardare Diana and Rusu, G. I., Materials Science and Engineering B75 (2000), p.68.

Google Scholar

[23] Takahashi M, Mita K, Toyoki H, J. Mater. Sci. �24��1989) 243-246. Pt TiO2 Thin Films on Glass Substrates as Efficient Photocatalysts.

DOI: 10.1007/bf00660961

Google Scholar

[24] Paz Y, Heller A. J. Mater. Res., 12(10): (1997), 2759-2766. Photo oxidatively Self cleaning Transparent Titanium Dioxide Films on Soda Lime Glass: The Deleterious Effect of Sodium Contamination and Its Prevention.

DOI: 10.1557/jmr.1997.0367

Google Scholar

[25] Cullity, B.D., (1978). Elements of X-ray diffraction. Addison-wesley publishing company, Inc. London.

Google Scholar

[26] Jia YU., Zhao guo., Zhang Jian., Qing Zhao., Vol. 16 (2001) No. 2., Journal of Wuhan University of Technology-Mater. Sci. Ed.

Google Scholar

[27] Fan, Q., McQuillin. B., Bradley D.D.C., Whitelegg and Seddon A.B., Chemical Physics Letters 347 (2001), p.325.

Google Scholar