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Design and Characterization of Capacitive Micromachined Ultrasonic Transducer
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Design and Characterization of Capacitive Micromachined Ultrasonic Transducer

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Abstract:

As cMUTs (capacitive Micromachined Ultrasonic Transducer) offer numerous advantages over traditional transducers in terms of efficiency, bandwidth, and cost, they are expected to replace piezoelectric transducers in many applications. In particular, 2D-array cMUTs have aroused great interest in the medical engineering society because of their ability to materialize a true volumetric ultrasonic image. In this study, single element cMUTs with 32 x 32 and 64 x 64 cells were successfully fabricated. The diameter and thickness of the membrane are 35  and 1000 nm, respectively, with a sacrificial layer thickness of 600 nm. The electric characteristics of the fabricated cMUT were measured. Tests on the efficiencies of the cMUT in terms of wave generation and in terms of detection according to the bias and pulse voltage were performed in an air atmosphere.

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Periodical:

Key Engineering Materials (Volumes 321-323)

Pages:

132-135

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.321-323.132

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Online since:

October 2006

Authors:

Bong Young Ahn, Ki Bok Kim, Hae Won Park, Young Joo Kim, Yong Seok Kwak

Keywords:

Capacitive Micromachined Ultrasonic Transducer cMUT, Micro-Electromechanical System (MEMS), NDE (Nondestructive Evaluation), Non-Contact

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

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