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Fabrication of Patterned Metal Films on Organic Substrates by Transfer Printing

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Abstract:

Here a simple and direct method based on transfer printing has beep developed, in which rigid stamps transfer metal films deposited on the relief surface of the stamps onto patterned organic substrates. Ultra-precision machining technology is combined with conventional photolithography to fabricate patterned Si stamps and organic substrates by replica molding. Experiment results indicate that patterned metal films on Silicon stamps were successfully transferred onto PDMS substrates. Fabrication of patterned metal films on organic substrates by transfer printing may suit for fabricating sub-micrometer and nanometer scale features in a single process.

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Info:

Periodical:

Materials Science Forum (Volumes 532-533)

Pages:

524-527

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.532-533.524

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Online since:

December 2006

Authors:

Shen Dong, Xiao Li Zhao, Jing He Wang, Zheng Qiang Li, Tao Sun, Ying Chun Liang

Keywords:

PDMS (Polydimethylsiloxane), Photolithography, Stamp, Transfer Printing, Ultra-Precision Machining

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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