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Study on High Precision and Super-Slow Speed Feeding Table for Micro-EDM Machining

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Abstract:

A feeding table system is set up to meet the need for high motional precision and super-slow speed in micro-electron discharge machining (micro-EDM). It is composed of a resonant piezoelectric ceramics motor, a linear bearing and a linear encoder . It features high accuracy due to the application of linear driving, closed-1oop feedback and elimination of abbe’s errors. The characteristics of fine motion , slow speed and load capability are investigated. The results of the experiments show that the stable fine motion of this system can be as little as 100 nanometer and its speed can be as slow as 0.5 micron per second which is proper for feeding table of micro-EDM.

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Periodical:

Key Engineering Materials (Volume 339)

Pages:

332-336

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.339.332

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Online since:

May 2007

Authors:

Xiang Yang Liu, D.W. Yu, X.J. Cai, H. Huang

Keywords:

Electric Discharge Machining (EDM), Feeding Table, High-Accuracy, Super-Slow Speed

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] S. Moriyama. T. Harada and T. Takanashi: Bull. Jpn, Soc, Precis. Eng, Vol. 22 (1998) No. 1, pp.13-17.

Google Scholar

[2] S. Baek, S.H. Chang, H.L. Chan and et al: IEEE Transactions on Magnetics, Vol. 39 (2003) No. 5, pp.2965-2967.

Google Scholar

[3] Y. Gao, S. Tse, D. Zhang and et al: Journal of Materials Processing Technology, Vol. 129 (2002), pp.485-489.

Google Scholar

[4] G.H. Xu and L.S. Qu: Proceedings of the IEEE International Conference on Industrial Technology (1996), pp.771-775.

Google Scholar

[5] J.Y. Byung, B.C. Goo, Y.N. Heung and et al: IEEE Transactions on Robotics and Automation, Vol. 19 (2003) No. 4, pp.604-612.

Google Scholar

[6] K. Time, P. Michele and M. Angelo: Power Engineering Journal, (June, 2002), pp.105-11.

Google Scholar