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A Framework of a Model-Based Simulation System for Prediction of Surface Generation in Fast Tool Servo Machining of Optical Microstructures

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Abstract:

The fabrication of high-quality optical microstructural surfaces is based on fast tool servo (FTS) machining. It makes use of auxiliary piezo-electric driven servos to rapidly actuate the diamond tool with a fine resolution and a sufficiently high bandwidth for machining optical microstructures with submicrometer form accuracy and a nanometric surface finish without the need for any subsequent post processing. However, the achievement of a superior mirror finish and form accuracy still depends largely on the experience and skills of the machine operators, acquired through an expensive trial-and-error approach to using new materials, new mircostructural surface designs, or new machine tools. As a result, this paper, a model-based simulation system is presented for the optimization of surface quality in the FTS machining of optical microstructures. Preliminary experimental work and the results are also presented.

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Periodical:

Key Engineering Materials (Volume 339)

Pages:

407-411

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.339.407

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Online since:

May 2007

Authors:

Chi Fai Cheung, Wing Bun Lee, Sandy To, H.F. Li, Su Juan Wang

Keywords:

Fast Tool Servo Machining, Model-Based Simulation, Optical Microstructures, Optimization, Surface Generation

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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