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Three-Dimensional Microstructure Reconstruction Using FIB-OIM

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Abstract:

A new method for reconstructing a three-dimensional microstructure using the focused ion beam-orientation imaging microscopy (FIB-OIM) is introduced. The technique is important for the study of three-dimensional microstructures of materials because it can automatically align (register) a series of parallel sections with both topological information and orientation information at the sub-micrometer scale. Using voxel-based tessellation, a three-dimensional microstructure is reconstructed by registering each section. The application of the method to a cubic material is described and, based on the reconstruction, the grain shape and grain size distribution are characterized.

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Periodical:

Materials Science Forum (Volumes 558-559)

Pages:

915-920

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.558-559.915

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Online since:

October 2007

Authors:

Suk Bin Lee, Anthony D. Rollett, Gregory S. Rohrer

Keywords:

Disorientation, Electron Backscatter Diffraction (EBSD), Focused Ion Beam-Orientation Imaging Microscopy (FIB-OIM), Normalised Grain Size Distribution, Serial Sectioning

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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