Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand

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Abstract:

MEM (Micro-Electro-Mechanical System) is the integration system of mechanical elements, sensors, actuators, and electronics on a silicon substrate using the micro fabrication technology, in general. A new MEMS formation technology is proposed in this paper. The improved drop-on-demand ink jet was used and the MEMS was formed on the plastics and silicon substrate. The plastics resins were injected from the drop-on-demand head on the substrate and the dropped resins were cured using ultraviolet rays. Thus micro lenses were formed.

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Periodical:

Key Engineering Materials (Volumes 364-366)

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30-34

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December 2007

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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