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Single-Point Diamond Turning of Aspheric Mirror with Inner Reflecting Surfaces

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Abstract:

Grazing incidence optics used in soft X-ray microscopes require supersmooth surface and highly accurate figure. We considered the fabrication of a Wolter type I mirror, one of grazing incidence optics, with axial-symmetric inner reflecting surfaces using single-point diamond turning. Electroless nickel was chosen as reflecting material Cutting conditions for machining the inner reflecting surface were restricted because of long arm of a single-crystal diamond tool. The machined Wolter type I mirror had approximately 270 nm P-V in figure error and 3 nm Ra in surface roughness. The direct-machined Wolter type I mirror could be successfully used in a soft Xray microscope based on laser-produced X-ray source.

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Periodical:

Key Engineering Materials (Volumes 364-366)

Pages:

39-42

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.364-366.39

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Online since:

December 2007

Authors:

Kwon Su Chon, Yoshiharu Namba, Kwon Ha Yoon

Keywords:

Aspheric Mirror, Figure Error, Single-Point Diamond Turning, Surface Roughness (SR), X-Ray Optics

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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