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Study on Contact Mechanism of Interface in Wafer CMP Based on Abrasion Behavior
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Hydrodynamic Analysis of Circular Translational Polishing under Mixed Lubrication
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Research on Nanoscale Material Removal Process Using Atomic Force Microscopy
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Experimental Study of Precision Polishing of Hard and Brittle Material
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Influences of Machining Parameters on Silicon Wafer Polished with Gel-Coupled Ultra-Fine Abrasive Polishing Pads
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Study on Mechanical Polishing for CVD Diamond Films of Forming Nucleus Surface and Growing Surface
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Experimental Study of Precision Polishing of Hard and Brittle Material

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Abstract:

The application of hard and brittle materials become wider and wider because its self-characteristics. It is used widely in finish machining of products, such as memory record device, information products, precision instrument, etc. Traditional grinding-polishing methods have not suited for precision machining requirements of hard and brittle materials. Carbide and ceramic are chosen as workpiece. Diamond polishing film is chosen as polishing tool. Polishing experiments are done by using self-made film polishing machine with high speed and cooling inside. Polishing mechanism and polishing technology of what polishing film polishes hard and brittle materials will be studied by changing polishing speed and diamond grain size and so on. The experimental study of wear shape of gringding grain, desquamation process of grain and surface quality of workpiece will be done in this paper so that the reasonable technology of polishing hard and brittle materials with high productivity is obtained. It enrich and perfect the ultra-precision machining theory. A new method of ultra-precision lapping and polishing of hard and brittle materials is provided.

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Periodical:

Key Engineering Materials (Volumes 359-360)

Pages:

274-278

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.359-360.274

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Online since:

November 2007

Authors:

Li Hua Dong, Chun Hua Fan, Jian Huang, Hong Xia Luo

Keywords:

Brittle Materials, Experiment, Hard Material, Polishing, Precision

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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