Materials Science & Technology

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9/7/2009 - 9/10/2009
6/28/2009 - 7/3/2009

Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface

doi:10.4028/0-87849-683-1.209
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