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HomeMaterials Science ForumMaterials Science Forum Vols. 408-412Oriented Growth of LiNbO3 Thin Films for SAW...

Oriented Growth of LiNbO₃ Thin Films for SAW Properties

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Textures of Materials - ICOTOM 13

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Periodical:

Materials Science Forum (Volumes 408-412)

Pages:

1573-1578

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.408-412.1573

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Online since:

August 2002

Authors:

V. Bornand, I. Huet, Daniel Chateigner, Ph. Papet

Keywords:

2-Step Growth, Al₂O₃ Substrate, LiNbO₃, Lithium Niobate, Oriented Thin Films, Pyrosol, RF Sputtering, SAW Device, Si Substrate, Texture

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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