Improvement in the Ground Surface Roughness of Fused Silica X-Ray Mirror with ELID-Grinding

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Key Engineering Materials (Volumes 238-239)

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143-146

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April 2003

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[1] H. Ohmori, Y. Yamagata, S. Moriyasu, S. Morita, and W. Lin: "Development of Large Ultraprecision Grinding System with ELID for Aspheric Optical Elements and Components", 9 th International Conference on Production Engineering, Osaka, Japan, (August 29-September 1, 1999) 147-152.

DOI: 10.1142/9789812817822_0020

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[2] H. Ohmori, and T. Nakagawa: "Mirror Surface Grinding of Silicon Wafer with Electrolytic In-process Dressing", ANNALS of the CIRP, 39, 1, (1990) 329-332.

DOI: 10.1016/s0007-8506(07)61065-8

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[3] H. Ohmori: "Electrolytic in-process dressing (ELID) grinding technique for ultraprecision mirror surface machining", International Journal of the Japan Society for Precision Engineering, 26, 4 (1992) 273-278.

DOI: 10.2493/jjspe.59.1451

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[4] H. Ohmori, and T. Nakagawa: "Analysis of Mirror Surface Generation of Hard and Brittle Materials by ELID (Electrolytic In-Process Dressing) Grinding with Superfine Grain Metallic Bond Wheels", ANNALS of the CIRP, 44, 1, (1995) 287-290.

DOI: 10.1016/s0007-8506(07)62327-0

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[5] Kazuhito Nishimura, Weimin Lin, and Hitoshi Ohmori: "Mirror-surface finishing of CVD diamond film by ELID grinding", New Diamond and Frontier Carbon Technology, 10, 3 (2000) 151-160.

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[6] Weimin Lin, Hitoshi Ohmori, Yutaka Yamagata, and Sei Moriyasu: "Nano Surface Fabricated of X-Ray Mirrors with ELID-grinding by Large Ultraprecision Aspheric Optics ELID-grinder", International Symposium of Advanced Manufacturing Technology ISAMT'2001, Nanjing, China, (October 27-29, 2001) 192-197.

DOI: 10.1142/9789812817822_0020

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