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Defect Characterization of the Structure-Growth Zone-Model for Sputter Deposited Cu Films

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Periodical:

Materials Science Forum (Volumes 445-446)

Pages:

69-71

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.445-446.69

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Online since:

January 2004

Authors:

Jérémie De Baerdemaeker, Charles Dauwe, Danny Segers, Christophe Detavernier, D. Deduytsche, W. Egger, Peter Sperr

Keywords:

Room Temperature Grain Growth, Slow Positron Annihilation, Sputter Deposition, Zone Model

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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