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Characteristics of SnO2 Thin Films Deposited by RF Magnetron Sputtering

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Abstract:

SnO2 thin films were prepared on SiO2/Si substrate by RF-Magentron Sputtering method, varying the deposition time and Ar-to-O2 flow ratio. The post-annealing was conducted at 500 oC and 700 oC in Ar and O2 atmosphere, respectively. Film characteristics were very sensitive to the gas flow ratio during the deposition and the conditions of post-annealing. The Film thickness decreased with decreasing of Ar flow ratio at a constant amount (50 sccm) of total gas flow. Especially, the film deposited under Ar-O2 mixture gas (Ar-to-O2 ratio of 50%) showed clearly aggregated morphology of small particles (cauliflower) in a wide range of area. In the annealed films, these cauliflowers separated some small grains, decreasing the film thickness.

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Periodical:

Materials Science Forum (Volumes 449-452)

Pages:

993-996

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.449-452.993

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Online since:

March 2004

Authors:

Hyun Wook Ryu, Yong Joo Park, Hyo Sup Noh, Jin Seong Park

Keywords:

Cauliflower, Sputtering, Thin Film, TiN Dioxide

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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