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Developing a Moving-Coil Actuator for Nano-Imprint Lithography System

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Abstract:

Nano-imprint lithography (NIL) is one of the most promising technologies for the massproduction of nano-meter patterns. A commercial hydraulic press and a pair of hot plates were used as the NIL system reported so far. It is, however, large and heavy. In this paper, therefore, a new moving-coil actuator is proposed and is intended to be used as the driving power for a compact NIL system. Compared to the commercial hydraulic NIL system, two advantages of the new NIL system using the moving-coil actuator are the ease of precise control as well as the compact dimensions. Thus, it is suitable for the fabrication and replication of small-sized nano-meter patterns. To develop such a new moving-coil actuator, the electromagnetic finite element method (FEM) is utilized. In addition, a simple but effective state-space model is also established to describe the dynamic behavior of the moving-coil actuator. Finally, a series of simulations and experiments are carried out and the results show that the positioning accuracy of the developed moving-coil actuator is 1µm.

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Info:

Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

1027-1032

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.1027

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Cite this paper

Online since:

January 2006

Authors:

Jyh Chyang Renn, Yi An Yang, Cherng Shyong Chan

Keywords:

Electromagnetic, Finite Element Model (FEM), Moving-Coil Actuator, Nanoimprint Lithography, State Space

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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