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Thermal Stability, Structure and Mechanical Properties of TiSiN Coatings Prepared by Reactive DC Magnetron Co-Sputtering

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Abstract:

TiSiN coatings have been prepared by reactive DC magnetron co-sputtering on Corning glass and carbon steel substrates, using Ti-Si targets, with a constant Si:Ti area ratio of 0.2. The flow rate of nitrogen has been varied from 1.6 to 7.0 sccm, for a fixed argon flow rate of 25.0 sccm. We present a study of structure (texture, crystallite size and microstrain), chemical composition, and mechanical properties of the coatings and their dependence on the argon/nitrogen ratio. Moreover, a study of the thermal stability of the coatings has been performed by means of thermal annealing under oxidizing conditions (air atmosphere) at 500 and 600 °C. Coatings with the smallest crystallite size (∼2 nm) present the highest hardness (26 GPa) and the best thermal stability.

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Periodical:

Materials Science Forum (Volume 509)

Pages:

93-98

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.509.93

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Online since:

March 2006

Authors:

L. García-González, J. Morales-Hernández, F.J. Espinoza-Beltrán, J. Muñoz-Saldaña, T. Scholz, Gerold A. Schneider

Keywords:

Crystallite Size, Hard Coating, Nanoindentation, Raman Scattering, Texture, Ti-Si-N

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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