Paper Titles
Grain-Focused Microstructure Simulations: Stress-Induced Evolution of Polycrystalline Films
p.1178
Low Temperature MOCVD-Processed Alumina Coatings
p.1184
MOCVD Route to the Fabrication of Calcium Copper Titanate (CaCu3Ti4O12) Thin Films
p.1194
Sintering of EPD Ceramic Coatings by Electron Beam
p.1200
Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering
p.1206
Structure and Electromechanical Properties of Quenched PMN-PT Single Crystal Thin Films
p.1212
Coating of Austentic Stainless Steel with Ti/O Compositionally Gradient Film by Reactive DC Sputtering
p.1218
Microstructural and Mechanical Characterization of Mechanically-Activated Plasma-Sprayed Nanostructured Al2O3-TiO2 and Al2O3-ZrO2 Coatings
p.1224
Thermally Sprayed Coating Composites for Film Heating Devices
p.1230

Morphological and Structural Characterization of TiN/ZrN Superlattices Deposited by Reactive R.F. Magnetron Sputtering

Article Preview

Abstract:

TiN/ZrN multilayers coatings have been deposited using a reactive R. F. magnetron sputtering process. Nitride layers with different sputtering conditions have been stacked in order to obtain superlattices having different preferred orientations. The deposition rate has been considered as independent parameter which changes the energy and the momentum transfer of the backscattered particles, influencing films structure evolution.

You might also be interested in these eBooks
11th International Ceramics Congress View Preview

Info:

Periodical:

Advances in Science and Technology (Volume 45)

Pages:

1206-1211

DOI:

https://doi.org/10.4028/www.scientific.net/AST.45.1206

Citation:

Cite this paper

Online since:

October 2006

Authors:

Antonella Rizzo, Maria A. Signore, Tiziana Di Luccio, M. Antonella Tagliente, Maria Federica De Riccardis

Keywords:

RF Sputtering, Superlattice, TiN/ZrN, X-Ray Diffraction (XRD)

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2006 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] S. Ulrich, C. Ziebert, M. Stuber, E. Nold, H. Holleck, M. Groken, E. Schweitzer, P. Schlobmacher, Surf. Coat. Technol. 188-189 (2004) 331.

Google Scholar

[2] P. C. Yashar, W. D. Sproul, Vacuum 55 (1999) 179.

Google Scholar

[3] C. J. Tavares, L. Rebouta, B. Almeida, J. Bessa e Sousa, M. F. da Silva, J. C. Soares, Thin Solid Films 317 (1998) 124.

DOI: 10.1016/s0040-6090(97)00607-x

Google Scholar

[4] D. B. Lewis, Q. Luo, P. Eh. Hovsepian, W. -D. Munz, Surf. Coat. Technol. 184 (2004) 225.

Google Scholar

[5] H. C. Barshilia, A. Jain, K. S. Rajam, Vacuum 72 (2004) 241.

Google Scholar

[6] A. Rizzo, M. A. Signore, L. Mirenghi, E. Serra, Thin Solid Films, in press, available online 15 february 2006 at www. sciencedirect. com.

Google Scholar

[7] L. Combadiere, J. Machet, Surf. Coat. Technol. 88 (1996) 17.

Google Scholar

[8] M. I. Jones, I. R. McColl, D. M. Grant, Surf. Coat. Technol. 132 (2000) 143.

Google Scholar

[9] N. H. Hoang, D. R. McKenzie, W. D. McFall, Y. Yin, J. Appl. Phys. 80 (1996) 6279.

Google Scholar

[10] R. Banerjee, K. Singh, P. Ayyub, M. K. Totlani, A. K. Suri, J. Vac. Sci. Technol. A 21 (2003) 310.

Google Scholar

[11] B. Rauschenbach, J. W. Gerlach, Cryst. Res. Technol. 35 (2000) 675.

Google Scholar