Paper Titles

Properties of Dislocations and Point Defects in Fz-Si
p.319

Metastable States Associated with Interfacial MISFIT Dislocations in Si/Si(Ge) Heterostructures
p.325

Experimental Study of Anomalous Dislocation Kinks Drift in Germanium Single Crystals
p.333

Cu Precipitation in Strained and Relaxing Ge_xSi_1-x Heteroepitaxial Layers
p.339

Peculiarities of Defect Formation in SiGe/Si and SiGe/Ge Heterostructures
p.345

The Influence of Oxidation Induced Stacking Faults on Electrical Parameters of a CCD Device
p.353

Metals, Oxide Precipitates and Minority Carrier Lifetime in Silicon
p.359

UHV-VLPCVD Heteroepitaxial Growth of Thin SiGe-Layers on Si-Substrates: Influence of Pressure on Kinetics and on Surface-Morphology
p.361

Formation of High Quality SiGe/Si Heterostructures
p.373

HomeSolid State PhenomenaSolid State Phenomena Vols. 32-33Peculiarities of Defect Formation in SiGe/Si and...

Peculiarities of Defect Formation in SiGe/Si and SiGe/Ge Heterostructures

Article Preview

Abstract:

You might also be interested in these eBooks

Gettering and Defect Engineering in Semiconductor Technology V

Info:

Periodical:

Solid State Phenomena (Volumes 32-33)

Pages:

345-352

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.32-33.345

Citation:

Cite this paper

Online since:

December 1993

Authors:

V.I. Vdovin, M.G. Mil'vidskii, T.G. Yugova

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1993 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: