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HomeSolid State PhenomenaSolid State Phenomena Vols. 63-64Cathodoluminescence Study of Defect Distribution...

Cathodoluminescence Study of Defect Distribution at Different Depths in Films SiO₂/Si

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Beam Injection Assessment of Defects in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 63-64)

Pages:

237-242

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.63-64.237

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Online since:

December 1998

Authors:

M.V. Zamoryanskaya, V.I. Sokolov, Alla A. Sitnikova, S.G. Konnikov

Keywords:

Cathodoluminescence, Defect Distribution, SiO₂ Films on n-Type Si, SiO₂ Films on p-Type

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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