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HomeSolid State PhenomenaSolid State Phenomena Vols. 69-70Rare Earth Impurities and Impurity-Related Centers...

Rare Earth Impurities and Impurity-Related Centers in Silicon

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Gettering and Defect Engineering in Semiconductor Technology VIII

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Periodical:

Solid State Phenomena (Volumes 69-70)

Pages:

365-370

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.69-70.365

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Online since:

August 1999

Authors:

Valentin V. Emtsev, D.S. Poloskin, Elena I. Shek, N.A. Sobolev, Jürgen Michel, Lionel C. Kimerling

Keywords:

Implantation, Oxygen-Related Donors, Rare Earth Dopants, Silicon

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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