Paper Titles
Hydrogen Bonding and Grain-Boundary Defects in Laser Crystallized Poly-Si
p.191
Super-Grain Poly-Si by Metal Induced Crystallization of Amorphous Silicon
p.199
Metal-Induced Lateral Crystallization of Amorphous Silicon under Reduced Nickel Supply
p.207
Structural Properties of Nickel-Metal-Induced Laterally Crystallized Silicon Films
p.213
High-Temperature Crystallization of Amorphous Silicon on a Molybdenum Substrate
p.219
Rapid Joule Heating with Metal Films Used to Crystallize Silicon Films
p.225
Low-Temperature Crystallization of Poly-SiGe Thin-Films by Solid Phase Crystallization
p.231
Influence of Thermal Electron Irradiation on Crystallization of a Growing Si Film on a Glass Substrate
p.237
Solution Growth of Polycrystalline Silicon on Quartz Glass Substrates
p.243

High-Temperature Crystallization of Amorphous Silicon on a Molybdenum Substrate

Article Preview

Abstract:

You might also be interested in these eBooks
Polycrystalline Semiconductors VII View Preview

Info:

Periodical:

Solid State Phenomena (Volume 93)

Pages:

219-224

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.219

Citation:

Cite this paper

Online since:

June 2003

Authors:

Do Young Kim, Jae Kyung Ko, Joong Hyun Park, Utpal Gangopadhyay, Junsin Yi

Keywords:

Crystalline Volume Fraction, Crystallization, Hot-Wire Chemical Vapour Deposition, Molybdenum, Polycrystalline Silicon

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2003 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1997] � � � Masanobu Miyao, Isao Tsunoda, Yaizoh Sadoh, Atsushi Kenjo, Thin Solid Films, 383, 104 (2001). � � � Keunkyung Park, Shubneesh Batra, and Sanjay Banerjee, Appl. Phys. Lett., 58(21), 2414

DOI: 10.1016/s0040-6090(00)01634-5

Google Scholar

[1991] � � � Shuichi Uchikoga, and Nobuki Ibaraki, Thin Solid Films, 383, 19 (2001). � � � Masatoshi Wakgi, Toshiki Kaneko, Kiyoshi Ogata, and Asao Nakano, Mat. Res. Soc. Symp. Proc., 283, 555 (1993). � � � Yuliang He, Chenzhong Yin, Guangxu Cheng, Luchun Wang, and Xiangna Liu, J. Appl. Phys., 75(2), 797 (1993).

Google Scholar