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Hybrid Experimental – Numerical Full-Field Displacement Evaluation for Characterization of Micro-Scale Components of Mechatronic Systems

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Abstract:

Hybrid experimental – numerical techniques are applied to the problem of the interpretation of patterns of fringes that are generated by non-contact full-field experimental methods applied for analysis of dynamic displacement fields of MEMS components. It is shown that even rather simple cantilever beam of a MEMS switch can exhibit complex dynamical response due to the nonlinearities of interactions and the surrounding noise. In many instances the interpretation of experimental results is possible only after numerical simulation of MEMS components in virtual computational environments.

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Periodical:

Solid State Phenomena (Volume 113)

Pages:

73-78

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.113.73

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Online since:

June 2006

Authors:

Vytautas Ostaševičius, Norm Gitis, Arvydas Palevicius, Minvydas Ragulskis, Sigitas Tamulevičius

Keywords:

Holography, Mechatronics, Micro-Electromechanical System (MEMS), Visualization

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

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