Micro Hole Machining of Borosilicate Glass through Electrochemical Discharge Machining (ECDM) |
| Journal |
Key Engineering Materials (Volume 196) |
| Volume |
Precision Machining of Advanced Materials |
| Edited by |
L. Zhang |
| Pages |
149-166 |
| DOI |
10.4028/www.scientific.net/KEM.196.149 |
| Citation |
C.T. Yang et al., 2001, Key Engineering Materials, 196, 149 |
| Authors |
C.T. Yang, S.S. Ho, Bo Huei Yan |
| Keywords |
Borosilicate Glasses, Electric Discharge Machining (EDM), Electrochemical Discharge Machining, Etching, Micro-Electromechanical Systems (MEMS) |
| Full Paper |
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