Paper Title:

Micro Hole Machining of Borosilicate Glass through Electrochemical Discharge Machining (ECDM)

Periodical Key Engineering Materials (Volume 196)
Main Theme Precision Machining of Advanced Materials
Edited by L. Zhang
Pages 149-166
DOI 10.4028/www.scientific.net/KEM.196.149
Citation C.T. Yang et al., 2001, Key Engineering Materials, 196, 149
Authors C.T. Yang, S.S. Ho, Bo Huei Yan
Keywords Borosilicate Glasses, Electric Discharge Machining (EDM), Electrochemical Discharge Machining, Etching, Micro-Electromechanical System (MEMS)
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