Engineered Materials
Key Engineering Materials Volumes 86 - 87
doi:10.4028/www.scientific.net/KEM.86-87
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p345
Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates
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263 K
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Authors: M. Murtagh, S. Lynch, P.V. Kelly, P.A.F. Herbert, G.M. Crean -
p353
Incoming Inspection of Silicon-on-Insulator Substrates Using Spectroscopic and Single Wavelength Ellipsometry
[
255 K
]
Authors: S. Lynch, G.M. Crean -
p361
Acoustic Microscopy of Tape Automated Bonding (TAB) Tape for Interconnection and Packaging Applications
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355 K
]
Authors: C.M. Flannery, D. Zhang, G.M. Crean, S.C. O'Mathuna -
p369
Materials Ireland-3RD Generation R & D Management
[
85 K
]
Authors: A.D. Kennedy
