Papers by Author: Akshey Sehgal

Abstract: This work details the investigation of potential problems in Complimentary BiCMOS technology, especially PNP transistors arrays. Optical examination of the wafer revealed defects in the P Buried Layer (PBL) areas of the die. Electrical testing correlated these PBL defects to PNP array current leakage. As the PBL module is completed very early on in the process, we devised a shortloop (SL) to reproduce these defects and identify the root cause of current leakage.