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Papers by Author: Gerald Wagner

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Peracetic Acid as Active Species in Mixtures for Selective Etching of SiGe/Si Layer Systems – Aspects of Chemistry and Analytics

Authors: Mathias Guder, Bernd O. Kolbesen, Cécile Delattre, C. Fischer, H. Schier, Gerald Wagner

79

High Uniformity Wet Processing for Qxide Thinning and Polymer Cleaning Applications

Authors: Gerald Wagner, Kei Kinoshita, Reinhard Sellmer, Stefan Fichtl

81