HomeGerardo Montaño-Miranda

Papers by Author: Gerardo Montaño-Miranda

Paper TitlePage

Etching of Silicon Dioxide with Gas Phase HF and Water: Initiation, Bulk Etching, and Termination.

Authors: Gerardo Montaño-Miranda, Anthony J. Muscat

3

Gas-Phase HF/Vapor Etching of Thermal Silicon Dioxide Films

Authors: Gerardo Montaño-Miranda, Anthony J. Muscat

207