Papers by Author: Gerd Jäger

Abstract: The today’s nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.1 nm over the range of 25 mm x 25 mm x 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.

Abstract: The paper describes the operation of a high-precision wide scale three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm. The NPM-Machine has been developed by the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB). The integration of several, optical and tactile probe systems and scanning force microscopes makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and water inspection, circuit testing as well as measuring optical and mechanical precision work pieces such as micro lens arrays, concave lenses, mm-step height standards.