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Papers by Author: H. Kanetaka

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Potassium Adhesion to Various CVD Oxide and the Surface Cleaning with Hot UPW

Authors: T. Jizaimaru, H. Kanetaka, S. Omae, Tadahiro Ohmi

67

Influence of the Dissolved Gas in Cleaning Solution on Silicon Wafer Cleaning Efficiency

Authors: H. Kanetaka, Toshihiko Kujime, H. Yazaki, T. Kezuka, Tadahiro Ohmi

43