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Papers by Author: Hajime Shirai

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Low-Temperature Formation of Si-Nanocrystal Dots from Chlorinated Materials by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition and Optical Properties

Authors: Hajime Shirai, Toru Tsukamoto, Ken-ichi Kurosaki

275

High-Density Microwave Plasma-Enhanced Chemical Vapor Deposition of Crystalline Silicon Films for Solar Cell Devices

Authors: Hajime Shirai, Go Ohkawara, Masanobu Nakajima

109