Papers by Author: Hitoshi Ohmori

Abstract: The X-ray free electron laser (XFEL) is a new type of synchrotron facility, which can produce full coherent light at X-ray wavelength ranges. Its focusing system makes it possible to create an extremely intensive XFEL beam. Long-size focusing mirrors are necessary for this system from the viewpoint of X-ray radiation damage. We established the figuring system with an accuracy at the nanometre level. The focusing mirror has an elliptical curved shape with a length of 400 mm. Figure accuracy with a peak-to-valley height of 2 nm is achieved. The Kirkpatrick Baez focusing system was also designed and developed for two-dimensional focusing at Japanese XFEL.

Abstract: To cope with increasing demands on ultraprecision profiling and finishing of aspheric lens molds, we have implemented an ultra/ nanoprecision aspheric grinding system to be mounted with an ELID- capability and on-line feedback capability of profile accuracy. A WC mold has successfully ground and finished to be with several nanometric surface smoothness and with ultraprecise profile accuracy by just grinding process with ELID mechanism. Some specific conditions have been investigated to achieve better accuracy and quality on molds. This paper presentation introduce those R&D activities and also discuss on the latest achievements on this topics, with showing injected aspheric lenses by the molds.

Abstract: This paper reports a systematic investigation of a nozzle-type ELID grinding characteristics of cemented carbides. Two groups of experimental scheme were carried on by using fine grain cast iron diamond wheel and nozzle-type ELID grinding apparatus. The grinding forces were measured by a dynamometer and the ground surfaces were characterized using scanning electron microscopy (SEM) and atomic force microscope (AFM). The influences of electrolytic and grinding parameters on grinding force were discussed. The material removal mode and micro-morphology characteristics were also analyzed.

Abstract: A compensation method was proposed for correcting wheel setting error and residual form error in nanogrinding of axisymmetric surfaces. In this method, profile data from on-machine measurement were used to obtain the setting error of grinding wheel, as well as the normal residual form error. Compensation model of single-point inclined-axis grinding was built up for generating new compensation path. Grinding test of aspheric tungsten carbide mould was conducted to evaluate performances of the compensation method. A profile error of 182 nm (peak to valley) and average surface roughness of 1.71 nm were achieved. These results indicated that the form error compensation method may significantly improve form accuracy of ground surface.

Abstract: Silicon is widely used as the most important substrate material in integrated circuit and micro electronic devices field. Electrolytic in-process dressing (ELID) grinding technique is an effective grinding process especially for machining hard and brittle material. In this paper, using super fine abrasive wheel, sets of ELID cross grinding experiment were conducted for investigating the influences of various grinding conditions including grain sizes, rotation speeds of grinding wheel, rotation speeds of workpiece and ELID conditions on surface roughness during grinding silicon wafers. Surface roughness characteristics of fine ELID cross grinding for silicon wafers were discussed. In an optimized condition, surface roughness of 2.2 nm in Ra can be achieved by using #20000 wheel.

Abstract: The confine of ductile-mode cutting and brittle-mode cutting seems to be a crucial step for designing a brittle material removal process. However, the existing transition from ductile-mode to brittle-mode for BK7 material makes the confine of different mode very difficult. Through a series of micro/nano-machining tests, measurements of cutting forces and morphological appearance of cutting groove as well as the cross section at the certain depth of cut, the confirmation of ductile-mode cutting, transition-mode cutting and brittle-mode cutting has been clearly described in the paper. This lays a foundation for the fundamental understanding of cutting physics concerning of material characteristics and cutting tools, and thereafter for the development of optimal process technology.

Abstract: ELID (electrolytic in-process dressing) grinding was proposed by one of the authors for automatic dressing the grinding wheel while performing grinding for a long time. It offers a high effective way and has been widely used for grinding hard and brittle optical materials. However, those surfaces produced by fixed abrasive grinding are characterized by considerable sub-surface damage, micro-crack. Magneto-rheological finishing (MRF) is a novel precision finishing process for deterministic form correction and polishing of optical materials by utilizing magneto-rheological fluid. In this paper, an ultra-precision synergistic finishing process integrated MRF and ELID grinding is proposed for shorten total finishing time and improve finishing quality. A lot of nano-precision experiments have been carried out to grind and finish some optical materials such as silicon, silicon carbide, etc. ELID grinding is employed to obtain high efficiency and high surface quality, and then, MRF is employed to improve further surface roughness and form accuracy. In general, form accuracy of ~ λ/20 nm peak-to-valley (P-V) and surface roughness less than 10 Angstrom are produced in high efficiency.

Abstract: Silicon carbide (SiC) materials have increasingly been needed in the wide range of industries, such as for structural components, automobile parts, space telescope, X-ray mirror, and next-generation semiconductors. However, SiC materials have difficulties in super-smooth finishing because of their hard and brittle characteristics. The authors have been investigating appropriate conditions on their finishing by fine-grinding with the unique grinding process called ELID (Electrolytic In-process Dressing) grinding method. The ELID grinding method has a stable grinding ability, so very detailed characteristics of their material-remove mechanisms were to be investigated. Surface analysis of each material has been discussed through the ELID, and this study proposes good finishing conditions for SiC. In this paper, the advantages of the applied fine-grinding are shown, and unique features on grinding characteristics of SiC through various grinding experimental parameters are described.

Abstract: Now that nano diamonds can be produced stably at low costs, there are growing needs to explore new areas of applications. This report discusses basic polishing experiments performed on nano diamonds to investigate their frictional and wear characteristics during polishing, and the results been obtained. The authors also propose a new terminology “tribo-fabrication” to mean an area of research on tribological phenomena seen with the interface of workpiece and tool surface in ultra-precision fabrication. These new term as well as the polishing characteristics of nano diamond are discussed.

Abstract: Progress of new dental materials such as biocompatible metal, ceramics is being accelerated because of aging society and sophistication of medical treatment. In addition, the demand for dental implant treatment is increasing. Currently, dental implant crowns (superstructures) are formed by cutting semi-sintered ceramics and then sintering the ceramics at a high temperature. So, there is some concern that to maintain the form accuracy of the workpiece is difficult. Meanwhile, it is usually difficult to machine sintered ceramics with high precision and high efficiency. In this paper, we tried to apply grinding with metal bonded superabrasive wheels, and investigated the grinding and surface characteristics of an alumina and zirconia ceramics for dental implant superstructure due to lack of such data. As a result of experiments, sintered dental ceramics can be ground with high precision and Fe, it has harmful effect to human body, was not detected in sintered dental ceramics.