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Papers by Author: J.M. Fabbri

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Post Copper CMP: a Two Steps Cleaning Recipe

Authors: Alessio Beverina, J.M. Fabbri, Didier Lévy, F. Tardif, Pascal Besson

299

Low Consumption Front End of the Line Cleaning: LC-FEOL

Authors: Pascal Besson, C. Cowache, J.M. Fabbri, F. Tardif, Alessio Beverina

199