Papers by Author: Jea Gun Park

Abstract: We demonstrated a nonvolatile memory fabricated with the sandwich device structure of Al/Au nano-crystals embedded in the PVK/Al. The bi-stable conduction switching characteristic (Ion/Ioff ratio) was >1x102, depending on Au nano-crystal size. The size and distribution of Au nano-crystals were determined by the inserted Au-layer thickness between PVK layers. The size of Au nano-crystals increased with the inserted Au-layer thickness. The uniform distribution of isolated Au nano-crystals was obtained with 5 nm of the inserted Au-layer thickness.

Abstract: The purpose of this study is to reveal the mechanism of wafer touch polishing by high purity colloidal silica slurry containing organic surfactants such as HEC (hydroxyl-ethyl cellulose). The effect of surfactant concentration on wafer touch polishing was studied with the aim of improving roughness on wafer surface after polishing. As a result, the level of haze and micro-roughness are decreased with the decrease of surfactant concentration.