Papers by Author: Ji Hoon Cha

Abstract: The general method to remove contaminated particles in the non-pattern cleaning such as pre-photo cleaning, post-deposition cleaning, and post-CMP cleaning is to physically remove particles using spray nozzle. However, high-speed fluids for increasing particle removal efficiency cause static electricity due to friction between liquid and nozzle surfaces, resulting in unexpected charge defects. In this study, we propose a method to reduce static electricity by changing the material of nozzle and grounding by visualizing static electricity according to electric voltage.