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Papers by Author: Joon Bum Shim

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Elimination of Watermark on Extremely High-Doped Poly-Silicon Surfaces Using HF-Vapor Cleaning

Authors: Kang Heon Lee, John Ghekiere, Joon Bum Shim, Eric J. Bergman, Gyu Hyun Kim, Bai Kil Choi, Kee Joon Oh, Geun Min Choi

Prevention of Copper Cross-Contamination on Cu Process and Non-Cu Process Mixed Fabrication

Authors: Joon Bum Shim, Kang Hyun Lee, Kee Ho Kim, Heung Soo Park

Abstract: When the integration of Cu process and non-Cu process is mixed in the fabrication, the prevention of Cu cross-contamination between wafer-to-wafer and machine-to-machine is critical. This study suggests a prevention method of the cross-contamination in Cu fabrication line.

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