Papers by Author: L. Oberbeck

Paper TitlePage

Low-Temperature Epitaxy on Polycrystalline Silicon Substrates
Authors: Thomas A. Wagner, L. Oberbeck, R.B. Bergmann, M. Nerding, Horst P. Strunk, Jens Werner
121
Intra-Grain Defects - Limiting Factor for Low-Temperature Polycrystalline Silicon Films?
Authors: Thomas A. Wagner, L. Oberbeck, R.B. Bergmann, Jens Werner
95
Low-Temperature Silicon Epitaxy by Ion-Assisted Deposition
Authors: L. Oberbeck, R.B. Bergmann, N. Jensen, S. Oelting, Jens Werner
459
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