HomeM. Tzolov

Papers by Author: M. Tzolov

Paper TitlePage

Deposition of Microcrystalline Silicon Films by Magnetron Sputtering

Authors: M. Tzolov, Y. Jeliazova, Reinhard Carius, L. Houben, F. Finger, N. Tzenov

107

Growth of n-Type Microcrystalline Silicon at Different Plasma Excitation Frequencies

Authors: P. Hapke, M. Luysberg, Reinhard Carius, M. Tzolov, F. Finger, H. Wagner

161