Papers by Author: Marco Rossi

Abstract: Hydrogenated nanocrystalline silicon for photovoltaic applications has been investigated. Morphological properties, as well as electrical properties, have been investigated with high spatial resolution by scanning force microscopy analyses (AFM, Atomic Force Microscopy and C-AFM conductive AFM). A major problem regarding the electronic properties is to understand where the current flows. The present contribution aims to clarify which of the material phases mainly contributes to the conduction mechanism.

Abstract: We report on the investigation of electrical properties of polycrystalline 3C-SiC thin films deposited on oxidized Si by low pressure chemical vapor deposition (LPCVD) to obtain bi-layer structures [Si(100)/SiO2/poly 3C-SiC] for pressure sensors and micro-electromechanical system (MEMS) applications. Polycrystalline 3C-SiC films have been preliminary characterized in their compositional, structural, morphological and electrical properties. Moreover, metal contact definition has been carefully optimized by transmission line method (TLM) analyses performed at different temperatures. We focuses the attention on the evaluation of the bulk resistivity (ρ), the specific contact resistivity (ρc) and their behavior dependence on the temperature because these are the characteristics of major importance for the fabrication of pressure sensors or MEMS.