Papers by Author: Michael Neugebauer

Abstract: This paper presents results of the dimensional calibration of piston-cylinder assemblies to be used for the joint NMI project “Re-determination of the Boltzmann constant”. Several measurements optimization strategies are described. For the first time 3D uncertainties in the range of 8 nm (piston) and 16 nm (cylinder) could be achieved.

Abstract: The uncertainty of dimensional measurements is influenced by numerous different sources, such as the properties of the instrument used, the environmental conditions, the interaction between sensor and surface, and the object properties themselves. In our contribution we focus on the influence of form deviations and surface topography. This influence will be demonstrated by some characteristic examples of micro-component measurements and by the analysis of simulated 2D-data.

Abstract: This paper presents procedures and standards to test tactile and optical microsensors and micro-computed tomography (CT) systems. The tests are similar to the established tests for classical coordinate measuring machines and assess local and global sensor characteristics. For this purpose, adequate and miniaturized reference standards were manufactured, calibrated and tested. In addition, task-specific reference standards have been realized to determine special sensor characteristics such as the maximum slope angle measurable by optical sensors or specific errors of tactile-optical microprobes measuring deep microholes.