Papers by Author: Qian Fa Deng

Abstract: Shear thickening polishing (STP) method was newly developed to achieve high efficient and high quality finishing of complex curved surface. The shear thickening fluid based slurry is one of the key factors in STP process. Viscosity of different shear thickening polishing slurry (STPS) was tested by rheometer in this study. The influences of dispersed particle size and concentration, abrasive material, abrasive particle size and concentration on the rheological property of STPS were analyzed. The results show that smaller dispersed particle (5.5 or 13μm in this study) and relative higher concentration (50-55 wt.%) are better for shear thickening effect of the base fluid. The viscosity of base fluid increases from 0.15-0.3 Pa·s to 0.8-1.1 Pa·s under high shear rate. The participation of Al₂O₃ and diamond abrasive changes the rheological property little, and the viscosity of STPS reaches the highest value 1.8 Pa·s at shear rate 300 s^-1. But SiC abrasive obviously destroys the shear thickening effect. SPTS with different Al₂O₃ abrasive concentration in this study presents almost same viscosity curve. It is inferred that the number of the abrasive particle but not the weight ratio plays the role to effect the rheological property of STPS.

Abstract: In order to reduce or eliminate the surface defects caused by abrasive grains and improve the efficiency of ultra-precision processing, the technique of semi-fixed machining has been proposed for machining advanced ceramics. A semi-fixed abrasive tool (SFAT) has been manufactured; it has performances of semi-fixed machining technique. This document demonstrates wear characteristics of SFAT through experiments of machining silicon wafer. It showed that wet status or dry status of SFAT has greatly influenced wear characteristics of SFAT. Wear characteristic of SFAT presented mostly blockage and little grain-off occurred in dry status; mostly grain-off and little blockage presented in wet status.

Abstract: ‘Trap’ effect of the newly developed semi-fixed abrasive tool (SFAT) plays key role in decreasing the surface damages of advanced ceramics caused by the undesirable large particles emerging in machining area. Influences of characteristics of the large particle, such as size, shape and concentration, on the ‘trap’ effect of SFAT are studied with Particle Flow Code (PFC) simulation and lapping experiments. A normalized normal force is defined to evaluate the ‘trap’ effect in PFC simulation, and surface roughness is taken as an indicator in lapping experiments. The results show that the change of surface roughness is according to the one of normalized normal force. Bigger normalized normal force is better for ‘trap’ effect and surface roughness. ‘Trap’ effect works well when the large particle is in small size, sharp shape, and low concentration. In this study, the followed characteristics of the large particle are good for ‘trap’ effect of SFAT made of 1000# SiC abrasive: size <17µm, corner angle < 60°, and concentration <18 particles per mm2.

Abstract: A three-dimensional hydrodynamic lubrication model for chemical-mechanical polishing is presented based on the Reynolds equation and Reynolds boundary condition. By solving the Reynolds equation, the slurry film pressure distribution has been obtained. The effects of minimum film thickness and the wafer tile angle on the film pressure are analyzed, and the influence of the polishing applied load and rotation speed on slurry film thickness and tilt angle are discussed. At last, by experiment, it is found that the simulation results are similar to experiment results which film thickness is increasing with the increasing of rotation speed, decreasing of the applied load. It is proved that the simulation is reliable.

Abstract: The most typical example of hard and brittle material is advanced ceramics, for its ultra-precision machining difficulty and wide applications, now it becomes a focus of attention. Semi-fixed abrasive plate (SFAP) is newly developed for preventing larger particles from doing workpiece surface damage in machining advanced ceramics, for larger particles from grain size dispersion or from outside of processing area could bring uneven load distribution on processing region of advanced ceramics. In this paper, Shearing strength, surface hardness and Young’s modulus as characteristics of SFAP are investigated. They were influenced by Grain size and abrasive weight ratio are analyzed and discussed, as well as the qualitative estimation of these influences on the characteristics of SFAP are deduced.

Abstract: To improve efficiency in ultra-precision lapping germanium (Ge) substrate, a new ultra-precise process technology is introduced in this paper. Two steps ultra-precise process were semi bonded abrasive lapping in rough machining, and CMP process in finish machining. A good surface quality workpiece was obtained in semi bonded abrasive lapping process efficiently. Several machining parameters were compared and applied. After CMP process, the mirror-like surface of Ge substrate was obtained.

Abstract: To obtain high surface quality and high finishing efficiency in machining SUS440 stainless steel, a novel machining technology employing a semi-fixed abrasive plate (SFAP) is adopted. The SFAP is developed for preventing lapped surface from damage caused by larger particles (from grain size dispersion or from outside of processing area, larger particles could bring uneven load distribution on processing region). The effects of different parameters on the surface quality and the material removal rate (MRR) of SUS440 stainless steel which is lapped by SFAP are investigated in this paper. The control parameters of the lapping process include the lapping time, the load, the rotating speed of the lapping plate, and etc. SFAP of 800# SiC abrasive used, Experimental results indicate that SFAP can avoid the large scratch effectively and the surface roughness (Ra) of the workpiece could be improved from 250 nm to 50 nm in 12 Min. A nearly mirror-like surface can be obtained.

Abstract: The most typical example of hard and brittle material is advanced ceramics, for its ultra-precision machining difficulty and wide applications, now it becomes a focus of attention. Semi-fixed abrasive plate (SFAP) is newly developed tool for machining advanced ceramics; As a result of SFAP abrasion, a gradual change takes place in the SFAP topography to influence on machining results and productivity. The paper shows experiment procedures to evaluate SFAP abrasion rate and workpiece material removal. The results of experiments are discussed and analyzed, it indicates that wet status of SFAP have great influences on the removal rate and SFAP abrasion. Compared with dry status of SFAP, wet status of SFAP can achieve higher processing efficiency.

Abstract: In plane lapping, workpiece material removal and lapping wheel wear has been influenced each other and should be evenly distributed. Only required a flat lapping wheel, it could be obtained with flat workpieces and small thickness deviations. Therefore, the choice of the truing operation has an important effect on the quality of the lapping wheel and on the flatness of product. This is a way that using truing ring to true lapping wheel in certain eccentricity plane lapping system　to acquire the flatness. The kinematics of certain eccentricity plane lapping for uniformity of processing is analyzed in this paper firstly. Then different sizes and locations of truing ring that influences truing on the flatness of lapping wheel has evaluated and simulated. Lastly, a suitable truing operation of certain eccentricity plane lapping is proposed.

Abstract: The amorphous Ni-Pd-P alloy films with superior property have good heat conductivity and wear performance. They are widely used in the protecting coating. Copper has been chosen to be a substrate material of the produce of amorphous Ni-Pd-P alloy films with its unique electrical properties. The precision lapping technology for the copper substrate using semi-bonded abrasive grinding plate is studied in this paper. The influences of the different lapping parameters on the surface roughness, material removal rate on copper substrate surface formation in the precision lapping process are both discussed. Experimental results indicate that the copper substrate can be efficiently processed by 800# SiC semi-bonded abrasive grinding plate of, and the initial roughness of a machined surface could be improved from 0.553μm Ra to 0.28μm in 10min, yielding a ideal rarely scratch surface.