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Papers by Author: Seung Ki Chae

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A Study on Germanium as a Contaminant Source in Semiconductor Fabrication Process

Authors: Dong Won Hwang, Jae Seok Lee, Pil Kwon Jun, Yang Ku Lee, Seung Ki Chae

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Application of Aerodynamic Lenses to In Situ Particle Monitors (ISPM) for Higher Reliability in Semiconductor Fabrication Process

Authors: Taesung Kim, Seung Ki Chae

273

Development of New Batch-Type Plasma Assisted NOR (Native-Oxide-Removal) Dry Cleaning Equipment

Authors: Wan Sik Kim, Wan Goo Hwang, Il-Kyoung Kim, Ki-Young Yun, Kwang Myung Lee, Seung Ki Chae

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