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Papers by Author: Takehiro Higuchi

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Effect of Texture and Structure of Carbon Sources on Synthesis of β-SiC Thin Film

Authors: Yasuo Uchiyama, Naoki Urase, Takehiro Higuchi, Hideaki Sano

141

A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

Authors: J.W. Kim, Yutaka Yamagata, Shinya MORITA, Sei Moriyasu, Hitoshi Ohmori, Takehiro Higuchi

19