Papers by Author: Takeshi Yamamoto

Abstract: Real time observations of SiC (000–1) C-face and (0001) Si-face oxidation were performed using an in-situ ellipsometer over the oxygen-partial-pressure range from 0.1 to 1.0 atm. We analyzed the relations between oxide growth rate and oxide thickness by applying an empirical relation proposed by Massoud et al. We found the occurrence of oxidation enhancement in the thin oxide regime also for Si-face as well as for C-face. We have discussed the oxygen-partial-pressure dependence of the oxidation rate constants between SiC C- and Si face, comparing with that of Si.

Abstract: To explain the growth rate enhancement of SiC oxidation in the thin oxide regime, which was recently found from the real time monitoring experiments of the initial oxidation stage of SiC (000–1) C-face using an in-situ spectroscopic ellipsometer, we tried to apply the interfacial Si emission model, which has been originally proposed for Si oxidation, and found that the Si emission model successfully reproduced the SiC oxidation rates at the whole range of oxide thickness and at oxidation temperatures measured. By comparing with the simulations for Si oxidation, we have discussed the oxidation mechanism of SiC.

Abstract: The practice and evaluation of elementary management of technology (hereafter, MOT) education has previously been investigated. It is recognized that elementary MOT education using trading games (hereafter, TG) has great educational effects on the awareness of the importance of MOT skills. On the other hand, a large amount of preparation time and labor is required when elementary MOT education using TG is first introduced into elementary schools. Development of a practical guidebook for elementary engineering management (hereafter, EM) education would likely be a useful educational tool for elementary EM education, and may then be applied in many elementary schools. In this study, a guidebook for elementary EM education is proposed, and its educational effects are verified. The practical application of elementary EM education to the finishing technology will be completed in the future works.