Papers by Author: Tie Bang Xie

Abstract: The texture and characteristics of surface have been becoming the leading factors to achieve the designed function of products successfully. So the measurement of surface texture is more and more important. A kind of new multi-function fusion measurement method for surface texture is presented in the paper. Four kinds of different scale measurement methods such as microscopy image measurement, vertical scanning white light interference measurement, white light interference nanoprobe measurement and white light interference diamond-probe measurement are fused for the surface texture multi-function fusion measurement in this method.

Abstract: For the online measurement of rolling guide grinding process, the design of an online measuring instrument for rolling guide-grinding size is introduced. This instrument has two sets of semiconductor lasers and photodiodes as the position detectors of workpiece, two sets of monolithic cutting parallel springs and voice coil motors as the drivers of probes, two sets of inductance displacement sensors as the size detectors. The rolling guide grinding size can be measured online by this instrument using the relative measurement method with data acquisition card, industrial control computer and top controlling software. This instrument has satisfied the operating requirements with practicality and reliability which is verified by the measurement results.

Abstract: A novel profilometer for three-dimensional (3D) surface topography measurement is presented. The profilometer has large measuring range, high precision and small measuring touch force. It is composed of a two-dimensional (2D) displacement sensor, a 3D platform based on vertical scanning, measuring and control circuits and an industrial control computer. When a workpiece is measured, the vertical undulation of the profile at a sampling point leads to a zero offset of the 2D displacement sensor. According to the zero offset, a piezoelectric actuator and a servo motor drive the vertical scanning platform to move vertically to ensure that the lever returns to its balance position. So the non-linear error caused by the rotation of the lever is very small even if the measuring range is large. When the stylus barges up against a steep wall, the horizontal resistance force results in another zero offset of the 2D displacement sensor. If the zero offset exceeds a quota, the vertical scanning platform descends to make the stylus climb the steep wall successfully. According to the theoretical and experimental analysis, the profilometer can measure roughness, profile of sphere, step, groove and other 3D surfaces with curvature precisely.

Abstract: We have constructed a novel contact stylus profilometer which is, in a certain sense, a combination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscope interferometer with a spatially and temporally incoherent light source. The system has large measurement range, high precision and small touch force. Its vertical measuring range is ±5 mm with a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range with a resolution of 1.25 μm. This paper describes the system and its performance along with results of measuring some samples.

Abstract: A profilometer for micro-surface topography measurement is presented. The instrument is based on the scanning white-light microscopic interferometry (SWLMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded by a CCD camera. A developed nano-positioning work stage with integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By white-light phase shifting algorism of arbitrary steps, frames of interferograms are processed by computer to rebuild and evaluate the measured profile. Because of the specialty of SWLMI, the profilometer is suitable for both smooth and rough surface measuring. It also can be used for the measurement of curved surface, dimension of MEMS etc. The vertical resolution of the profilometer is 0.5nm, lateral resolution 0.5+m.

Abstract: The surface topography characterization of MEMS device is very important to bonding technology of MEMS device. Motif characterizing method is a characterizing method of surface topography by graph. Aiming at the diversity and regionality of surface topography of MEMS device, in this study we have sampled the surface of MEMS device by 3-dimentinal grids using the surface profiler developed by us and characterizes the surface topography of MEMS device by the extended Motif characterizing method. The surface of MEMS device is divided into several Motif regions; the surface topography of every divided region can be evaluated respectively; the details of every region can be zoomed and these regions as a whole or every region can be revolved and projected; one of these regions can be as the reference of other regions. So the height, gradient and other characteristics of others regions of the whole MEMS device surface can be analyzed relative to the reference region; the whole and local surface topography of whole MEMS device can be analyzed.

Abstract: White-light interferometric technique has been widely applied in the measurement of three-dimensional profiles and roughness with high-precision. Based on the characteristic of interferometric technique, a new method combined with image location and a three-dimensional stage is proposed to achieve the non-contact absolute shape measurement for aspheric and spherical surface in a slarge range. The interference fringes vary with the horizontal displacement of the measured surface, the surface information was obtained by locating the transformation of the maximal intensity in the interferograms. Two main influence factors are discussed; they are performance of the inerferimetric microscope and the stage. Since the performance of the stage directly determines the measurement precision, a three-dimensional displacement stage with a large range and a high precision was developed. Some experiments were carried out to verify the performance of the three-dimensional displacement stage and the validity of the new measurement method with satisfactory results.

Abstract: Focus detection method is one of non-contact profile measurement methods. However, the measurement accuracy of current focus detection method is limited by voice coil motor adopted by it. In this paper, based on an improved Foucault focus detection method, a new non-contact displacement sensor with diffraction grating metrology system is presented. Driven by a piezoelectric actuator instead of a voice coil motor, and a diffraction grating metrology system being with it, the sensor has high measurement accuracy. During surface profile sampling, according to focusing deviation signal, the focusing lens was driven to move vertically by the piezoelectric actuator so that its focus was always located on the workpiece surface, synchronously the vertical displacement of the focusing lens was obtained by the diffraction grating metrology system as the profile height of sampling points. The displacements of all sampling points gave the whole profile of the measured surface, which can be processed by a characterization software to obtain the measurement result. The resolution of the non-contact displacement sensor was 10 nm.