Papers by Author: Wei Zhang

Abstract: With the micromachining technology, two perpendicular cavities are formed on a silicon substrate, and two thermistors whose resistances are equal are placed parallel in each cavity. The nature convention of the gas is produced by the thermistors which are used as both the heater and the sensitive element in the hermetic cavity, and the acceleration can be measured with the temperature difference sensed by the thermistors. At last the test about the sensor shows when the value of acceleration is at the range of ±7g, the non-linearity is less than 0.62%FS.

Abstract: In order to detect the rolling、pitch and yaw angle of high-speed-spin vehicle, a novel attitude sensor system is designed by using a digital signal processor TMS320F2812. The configuration of the sensor consists of two MEMS sensing elements and signal processing circuit and micro-processor. A new silicon MEMS gyroscope based on the Coriolis effect can sense three angular rate of spin vehicle, which can provide a synthesis signal, including roll, yaw and pitch angular rate. And a MEMS accelerometer reacts on demodulating the three angular rates. The design of the hardware circuit, the algorithm and implement of software are presented. The demodulation algorithm is validated by simulation experiment on the ground and the experimental results are presented.